Concepedia

Lokesh Subramany

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Statistics

Publications

3

Citations

38

H-Index

3

Active since

2013

Affiliations

GlobalFoundries (United States)(Current)

Lokesh Subramany is an author at GlobalFoundries (United States) specializing in instrumentation, engineering, and electrical engineering.

Top concepts

Publications per year

2013–2016

3

Publications

3

Implementation of hybrid metrology at HVM fab for 20nm and beyond

Alok Vaid, Lokesh Subramany, Givantha Iddawela et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 15 citations

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Signal response metrology (SRM): a new approach for lithography metrology

Stilian Pandev, Fang Fang, Young Ki Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 13 citations

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Analysis of wafer heating in 14nm DUV layers

Lokesh Subramany, Woong Jae Chung, Pavan Kumar Samudrala et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 10 citations

, , +19

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