Concepedia

Stilian Pandev

SP

Statistics

Publications

2

Citations

24

H-Index

2

Active since

2015

Affiliations

KLA (United States)(Current)

Stilian Pandev is an author at KLA (United States) specializing in calibration, education, and microscopy.

Top concepts

Publications per year

2015–2023

2

Publications

2

Signal response metrology (SRM): a new approach for lithography metrology

Stilian Pandev, Fang Fang, Young Ki Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 13 citations

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Mueller matrix spectroscopy and physics-based machine learning for gate-all-around sheet-specific metrology

Houssam Chouaib, Anderson Chou, V. Dimastrodonato et al. · 2023 · 11 citations

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