Concepedia

Shinroku Maejima

SM

Statistics

Publications

2

Citations

34

H-Index

2

Active since

2007

Affiliations

Renesas Electronics (Japan)(Current)

Shinroku Maejima is an author at Renesas Electronics (Japan) specializing in microelectronics, electronic packaging, and engineering.

Top concepts

Publications per year

2007–2007

2

Publications

2

Improved overlay control through automated high-order compensation

Shinji Wakamoto, Y. Ishii, Koji Yasukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 19 citations

, , +14

Extremely Low Keff (1.9) Cu Interconnects with Air Gap Formed Using SiOC

Takeshi Harada, Akira Ueki, Kazuo Tomita et al. · 2007 · 15 citations

, , +16

1–2 of 2