Concepedia

Taro Enomoto

TE

2

Publications

37

Citations

2

H-Index

2007

Active since

Affiliations

The University of Tokyo(Current)

Taro Enomoto is an author at The University of Tokyo specializing in engineering, materials science, and surface science.

Top concepts

EngineeringSurface ScienceMaterial ScienceCorrosionThin Films3D Printing3D IntegrationNanoelectronicsElectrochemistryMicroelectronics

Publications per year

2007–2010

2

Publications

2

Damageless Cu chemical mechanical polishing for porous SiOC/Cu interconnects

Seiichi Kondo, K. Fukaya, Koji Yamada et al. · Microelectronic Engineering · 2007 · 21 citations

Materials Science, Materials Engineering, Engineering +6

Hybrid Electrochemical Mechanical Planarization Process for Cu Dual-Damascene Through-Silicon Via Using Noncontact Electrode Pad

Shigeru Tominaga, Daisuke Abe, Taro Enomoto et al. · Japanese Journal of Applied Physics · 2010 · 16 citations

Engineering, Electrode-electrolyte Interface, Integrated Circuits +25

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