Statistics
Publications
2
Citations
25
H-Index
2
Active since
1993
Affiliations
KLA (United States)(Current)
Steven R. Lange is an author at KLA (United States) specializing in surface engineering, substrate preparation, and engineering.
Publications per year
1993–2010
2
2
The analysis of EUV mask defects using a wafer defect inspection system
Kyoungyong Cho, Joo-On Park, Chang-Min Park et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 15 citations
Engineering, Electrical Engineering, Manufacturing Engineering +16
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