Ui Yamaguchi

Integration and packaging technology of MEMS-on-CMOS capacitive tactile sensor for robot application using thick BCB isolation layer and backside-grooved electrical connection

Mitsutoshi Makihata, Shuji Tanaka, Masanori Muroyama et al. · Sensors and Actuators A Physical · 2012 · 31 citations

Engineering, Electrical Engineering, Robotics Engineering +17

Surface-mountable capacitive tactile sensors with flipped CMOS-diaphragm on a flexible and stretchable bus line

Sho Asano, Masanori Muroyama, Travis Bartley et al. · Sensors and Actuators A Physical · 2016 · 21 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

Adhesive wafer bonding using a molded thick benzocyclobutene layer for wafer-level integration of MEMS and LSI

Mitsutoshi Makihata, Shuji Tanaka, Masanori Muroyama et al. · Journal of Micromechanics and Microengineering · 2011 · 19 citations

Engineering, Materials Engineering, Materials Science +17

A 1.7mm<sup>3</sup> MEMS-on-CMOS tactile sensor using human-inspired autonomous common bus communication

Mitsutoshi Makihata, Masanori Muroyama, Yuri Nakano et al. · 2013 · 17 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

HSR, Human Support Robot as Research and Development Platform

Ui Yamaguchi, Fuminori Saito, Koichi Ikeda et al. · The Abstracts of the international conference on advanced mechatronics toward evolutionary fusion of IT and mechatronics ICAM · 2015 · 15 citations · Full text

Engineering, Mechanical Engineering, Robotics Engineering +10