А. V. Rumyantsev

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Active since

2015

Affiliations

National Research University of Electronic Technology(Current)

А. V. Rumyantsev is an author at National Research University of Electronic Technology specializing in engineering, microelectronics, and applied physics.

ORCID

Top concepts

EngineeringPhysicsMicrostructureApplied PhysicsSurface ScienceMicroelectronicsEducationMicroscopyInstrumentationMaterial Science

Publications per year

2015–2022

Publications

Simulation of material sputtering with a focused ion beam

А. V. Rumyantsev, Yu. A. Chaplygin · Technical Physics Letters · 2015 · 23 citations

Sputtering of redeposited material in focused ion beam silicon processing

А. V. Rumyantsev, Yuri Chaplygin · Materials Research Express · 2018 · 17 citations

Engineering, Target Fabrication, Material Simulation +16

Prediction of surface topography due to finite pixel spacing in FIB milling of rectangular boxes and trenches

А. V. Rumyantsev · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 15 citations

Engineering, Target Fabrication, Mechanical Engineering +21

Study of silicon dioxide focused ion beam sputtering using electron microscopy imaging and level set simulation

А. V. Rumyantsev, Yuri Chaplygin · Vacuum · 2022 · 13 citations

Ion Implantation, Engineering, Electron Microscopy Imaging +9

Characterizing interface structure between crystalline and ion bombarded silicon by transmission electron microscopy and molecular dynamics simulations

А. V. Rumyantsev, A. S. Prikhodko, Yuri Chaplygin · Applied Surface Science · 2020 · 10 citations

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