Yuri Chaplygin

Publications

Citations

H-Index

2013

Active since

Affiliations

National Research University of Electronic Technology(Current)

Yuri Chaplygin is an author at National Research University of Electronic Technology specializing in applied physics, surface science, and engineering.

Top concepts

EngineeringApplied PhysicsSurface SciencePhysicsMicrostructureMaterial ScienceMicroelectronicsMicrofabricationMaterials EngineeringDesign

Publications per year

2013–2022

Publications

Sputtering of redeposited material in focused ion beam silicon processing

А. V. Rumyantsev, Yuri Chaplygin · Materials Research Express · 2018 · 17 citations

Engineering, Target Fabrication, Material Simulation +16

Study of silicon dioxide focused ion beam sputtering using electron microscopy imaging and level set simulation

А. V. Rumyantsev, Yuri Chaplygin · Vacuum · 2022 · 13 citations

Ion Implantation, Engineering, Electron Microscopy Imaging +9

The Study of Different Structuring Techniques for Creation of Non-Evaporable Getters

A. N. Boyko, Yuri Chaplygin, Vladimir Petrov · Materials Sciences and Applications · 2013 · 10 citations · Full text

Different Structuring Techniques, Engineering, Nanoporous Material +22

Characterizing interface structure between crystalline and ion bombarded silicon by transmission electron microscopy and molecular dynamics simulations

А. V. Rumyantsev, A. S. Prikhodko, Yuri Chaplygin · Applied Surface Science · 2020 · 10 citations

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