Concepedia

Shich-Chang Suen

SS

1

Publications

13

Citations

1

H-Index

2001

Active since

Affiliations

National Institutes of Applied Research(Current)

Shich-Chang Suen is an author at National Institutes of Applied Research specializing in chemistry, electronic materials, and thin films.

Top concepts

ChemistryThin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceCarbon-based FilmsChemical EngineeringElectronic MaterialsMaterials Engineering

Publications per year

2001–2001

1

Publications

1

Characteristics of fluorinated amorphous carbon films and implementation of 0.15 μm Cu/a-C:F damascene interconnection

Jia‐Min Shieh, Shich-Chang Suen, Kou-Chiang Tsai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 13 citations

Engineering, Thin Film Process Technology, Chemistry +17

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