Concepedia

S. Saida

SS

3

Publications

122

Citations

3

H-Index

1996

Active since

Affiliations

Toshiba (Japan)(Current)

S. Saida is an author at Toshiba (Japan) specializing in thin films, electrical engineering, and engineering.

Top concepts

Publications per year

1996–2003

3

Publications

3

Leakage Current Mechanism of Amorphous and Polycrystalline Ta2 O 5 Films Grown by Chemical Vapor Deposition

Tomonori Aoyama, S. Saida, Y. Okayama et al. · Journal of The Electrochemical Society · 1996 · 86 citations

, , +13

Film Properties of Low-k Silicon Nitride Films Formed by Hexachlorodisilane and Ammonia

M. Tanaka, S. Saida, Y. Tsunashima · Journal of The Electrochemical Society · 2000 · 25 citations · Full text

, , +16

Highly reliable MONOS devices with optimized silicon nitride film having deuterium terminated charge traps

Motofumi Tanaka, S. Saida, Yuichiro Mitani et al. · 2003 · 11 citations

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