Concepedia

Author

S. Saida

Toshiba (Japan)

Also Known As

S. Saida, Shigehiko Saida

10

Publications

145

Citations

5

H-Index

9

Concepts

All Affiliations

Toshiba (Japan)
SS

About

S. Saida is an author at Toshiba (Japan) specializing in thin films, electrical engineering, and engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

2

2

111

2

Applied Physics

2

2

111

3

Electrical Engineering

2

2

111

4

Chemical Engineering

1

1

25

5

Chemistry

1

1

25

S. Saida

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3

Publications

122

Citations

3

H-Index

YearCitations

Leakage Current Mechanism of Amorphous and Polycrystalline Ta2 O 5 Films Grown by Chemical Vapor Deposition

Tomonori Aoyama, S. Saida, Y. Okayama,

Journal of The Electrochemical Society

1996

86

Film Properties of Low-k Silicon Nitride Films Formed by Hexachlorodisilane and Ammonia

M. Tanaka, S. Saida, Y. Tsunashima

Journal of The Electrochemical Society

2000

25

Highly reliable MONOS devices with optimized silicon nitride film having deuterium terminated charge traps

Motofumi Tanaka, S. Saida, Yuichiro Mitani,

2003

11

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