MEMS Resonators for Frequency Reference and Timing Applications

Guoqiang Wu, Jinghui Xu, Eldwin J. Ng, +1

Journal of Microelectromechanical Systems

Electrical EngineeringEngineeringMems ResonatorsMicrofabricationRadio Frequency Micro-electromechanical Systems +10

Low-Cost, Tiny-Sized MEMS Hydrophone Sensor for Water Pipeline Leak Detection

Jinghui Xu, Kevin Tshun-Chuan Chai, Guoqiang Wu, +6

IEEE Transactions on Industrial Electronics

Biomedical AcousticsWater Leak DetectionEngineeringMems Hydrophone DeviceMicroelectromechanical Systems +16

Design and Characterization of an Aluminum Nitride-Based MEMS Hydrophone With Biologically Honeycomb Architecture

Licheng Jia, Lei Shi, Chongbin Liu, +3

IEEE Transactions on Electron Devices

Biologically Honeycomb ArchitectureEngineeringMicroelectromechanical SystemsAcoustic SensorSensor Technology +17

Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications

Guoqiang Wu, Jinghui Xu, Xiaolin Zhang, +6

IEEE Transactions on Industrial Electronics

Advanced PackagingElectrical EngineeringPiezoelectric ResonatorSilicon Piezoelectric ResonatorEngineering +11

GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers

Guoqiang Wu, Yao Zhu, Srinivas Merugu, +3

Applied Physics Letters

Materials ScienceWave ResonatorElectrical EngineeringAluminium NitrideEngineering +10

Wafer-Level Vacuum Packaging for MEMS Resonators Using Glass Frit Bonding

Guoqiang Wu, Dehui Xu, Bin Xiong, +3

Journal of Microelectromechanical Systems

A Novel Trapezoidal ScAlN/AlN-Based MEMS Piezoelectric Accelerometer

Bohao Hu, Yan Liu, Binghui Lin, +3

IEEE Sensors Journal

Electrical EngineeringEngineeringVibrationsSensorsMicrofabrication +12

Phononic crystal strip based anchors for reducing anchor loss of micromechanical resonators

Duan Feng, Dehui Xu, Guoqiang Wu, +2

Journal of Applied Physics

Materials ScienceEngineeringMicromechanicsSonic CrystalMicrofabrication +13

A Temperature-Stable and Low Impedance Piezoelectric MEMS Resonator for Drop-in Replacement of Quartz Crystals

Wen Chen, Wenhan Jia, Yuhao Xiao, +2

IEEE Electron Device Letters

Materials ScienceAluminium NitrideElectrical EngineeringPiezoelectric Mems ResonatorHigh Temperature Materials +12

A High-Performance 9.5% Scandium-Doped Aluminum Nitride Piezoelectric MEMS Hydrophone With Honeycomb Structure

Licheng Jia, Lei Shi, Zhaoyang Lu, +2

IEEE Electron Device Letters