Journal
140
Publications
389
Citations
Top concepts
SensorsSiliconEngineeringMems SensorsMems MaterialsMems FabricationSensor MaterialsMaterials ScienceSilicon MaterialsElectronic Materials
Publications per year
1991–1991
140
140
A.C. Tobey · 1991 · 156 citations
Silicon Sensors And Microstructures
Janusz Bryzek · 1991 · 65 citations
1–2 of 140