Journal
104
Publications
397
Citations
Top concepts
EngineeringMicroelectromechanical SystemsElectrical EngineeringMicroelectronicsMems ResonatorsMaterials ScienceRf MemsMems DesignMems SwitchesMicrofabrication
Publications per year
2008–2008
104
104
INTEGRATED MEMS SWITCH TECHNOLOGY ON SOI-CMOS
Júlio Costa, Tony Ivanov, Jules L. Hammond et al. · 2008 · 22 citations · Full text
Engineering, Electrical Engineering, Microelectromechanical Systems +16
THE MICROMECHANICAL RESONANT SWITCH ("RESOSWITCH")
W.-C. Li, Ziwu Ren, T.-C. Nguyen · 2008 · 21 citations · Full text
Engineering, Electrical Engineering, Mechanical Engineering +17
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