A modified capacitance model of RF MEMS shunt switch incorporating fringing field effects of perforated beam

VLSI circuit reconstruction from mask topology

N.P. van der Meijs, J.T. Fokkema · Integration · 1984 · 179 citations · Full text

Engineering, Computer Engineering, Electrical Engineering +7

The Capacitance of a Parallel-Plate Capacitor by the Schwartz-Christoffel Transformation

Harlan B. Palmer · Transactions of the American Institute of Electrical Engineers · 1937 · 127 citations

Engineering, Electrical Engineering, Air Conditioning +10

Investigation of actuation voltage for non-uniform serpentine flexure design of RF-MEMS switch

Ashish Kumar Sharma, Navneet Gupta · Microsystem Technologies · 2013 · 22 citations

Engineering, Electrical Engineering, Materials Science +15

Holes Effects on RF MEMS Parallel Membranes Capacitors

Abdelhalim Bendali, Rafael Labedan, Frédéric Domingue et al. · 2006 · 16 citations

Engineering, Design, Electrical Engineering +17

Modelling and analysis of fringing and metal thickness effects in MEMS parallel plate capacitors

Kriyang Shah, Jugdutt Singh, Aladin Zayegh · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 13 citations

Engineering, Electrical Engineering, Mechanical Engineering +15