Microsystem Technologies · 2013 · 22 citations · 11 references
EngineeringElectrical EngineeringMaterials ScienceActuatorsMicroelectromechanical SystemsMicrofabricationMems ActuatorsMems CharacterizationMems DesignMems MaterialsMems SwitchesRf MemsActuation Voltage ReductionLow-voltage ActuationMicromachined Switch DesignRf Mems SwitchesSwitch ModelingVoltage
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Theory of Elasticity (3rd ed.)
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Design of low actuation voltage RF MEMS switch
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Micromechanical membrane switches for microwave applications
C. Goldsmith, Tsen-Hwang Lin, B. Powers et al. · 2002 · 184 citations
Il‐Joo Cho, Taeksang Song, Sang‐Hyun Baek et al. · IEEE Transactions on Microwave Theory and Techniques · 2005 · 118 citations