Sensors and Actuators A Physical · 2015 · 23 citations · 25 references
EngineeringMechanical EngineeringPhysicsDynamical SystemsMicroelectromechanical SystemsSensorsMems ActuatorsMems ModelingMems ResonatorsMems SensorsMems SimulationNonlinear DynamicsDynamic Mechanical CharacterizationNonlinearity CharacterizationProbabilistic Uncertainty AnalysisResonant MemsResonant Mems ActuatorsResonator ModelingVibration Modeling
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