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Formation and characterization of porous silicon films obtained by catalyzed vapor-chemical etching

Materials ScienceMaterials EngineeringChemical EngineeringEngineeringNanoporous MaterialCatalyzed Vapor-chemical EtchingMicrofabricationSurface ScienceApplied PhysicsSemiconductor Device FabricationPorous Silicon FilmsSilicon On InsulatorPlasma EtchingChemical Vapor Deposition