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Opto-Electronics Review · 2000 · 40 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationSurface EngineeringSurface ScienceEtching ProcessesSilicon MaterialsSurface ModificationSurface PassivationSurface PreparationSurface TexturingEtch ChemistryEtchingReactive Ion EtchingSilicon EtchingSurface Etching