Journal of Alloys and Compounds · 2015 · 24 citations · 29 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsMagnetron SputteringSputter DepositionSputteringSputtering EffectsSputtering Processes
29