Effect of deposition temperature on the properties of CeO2 films grown by atomic layer deposition

P King, M. Werner, Paul R. Chalker, Anthony C. Jones, Helen C. Aspinall, J. Basca, Jacqueline S. Wrench, Kate Black, Hywel O. Davies, Peter N. Heys

Thin Solid Films · 2011 · 40 citations · 17 references

Concepts

References

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