Thin Solid Films · 2011 · 40 citations · 17 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsAtomic Layer DepositionThin Film Optical PropertiesThin Film Thermal PropertiesThin-film DepositionAtomic Layer Deposition KineticsDeposition TechniquesFilm Growth MechanismsOxide Film FormationOxide Growth KineticsTemperature Effects On DepositionThin-film Growth Mechanisms
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N. Sivakumar, A. Narayanasamy, C. N. Chinnasamy et al. · Journal of Physics Condensed Matter · 2007 · 111 citations
Natural Sciences, Materials Engineering, Materials Science +17