Publication | Closed Access
Effect of deposition temperature on the properties of CeO2 films grown by atomic layer deposition
38
Citations
17
References
2011
Year
Materials ScienceEngineeringCeo2 FilmsSurface ScienceApplied PhysicsThin FilmsChemical DepositionEpitaxial GrowthDeposition TemperatureChemical Vapor DepositionAtomic Layer DepositionThin Film Processing
| Year | Citations | |
|---|---|---|
Page 1
Page 1