Concepedia

Ablation and cutting of planar silicon devices using femtosecond laser pulses

Niko Bärsch, K. Körber, Andreas Ostendorf, K.H. Tönshoff

Applied Physics A · 2003 · 143 citations · 0 references

Concepts

EngineeringManufacturing EngineeringMaterials EngineeringMicrofabricationPhotonicsSemiconductor DevicesLaser CuttingLaser Material ProcessingLaser PhysicsLaser Surface ProcessingMicrofabrication ProcessesUltrafast OpticsFemtosecond Laser PulsesLaser AblationLaser Surface AblationSiliconUltrafast Laser Material Processing