Profile surface roughness measurement using metrological atomic force microscope and uncertainty evaluation

GUIDE TO THE EXPRESSION OF UNCERTAINTY IN MEASUREMENT

Saudi Standard · 2006 · 6.5K citations

Computing, Physics, Metrology +9

Real-time, interferometrically measuring atomic force microscope for direct calibration of standards

Satoshi Gonda, Takuma Doi, Tomizo Kurosawa et al. · Review of Scientific Instruments · 1999 · 110 citations

Natural Sciences, Physics, Instrumentation +16

Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope

Ichiko Misumi, Satoshi Gonda, Tomizo Kurosawa et al. · Measurement Science and Technology · 2003 · 109 citations

Engineering, Materials Science, Instrumentation +16

Tip characterizer for atomic force microscopy

Hiroshi Itoh, Toshiyuki Fujimoto, Shingo Ichimura · Review of Scientific Instruments · 2006 · 69 citations

Natural Sciences, Materials Engineering, Materials Science +15

Sub-hundred nanometre pitch measurements using an AFM with differential laser interferometers for designing usable lateral scales

Ichiko Misumi, Satoshi Gonda, Qiangxian Huang et al. · Measurement Science and Technology · 2005 · 67 citations

Engineering, Materials Engineering, Materials Science +17