Concepedia

Deposition of thin films by ion plating on surfaces having various configurations

D. H. Buckley, J. S. Przybyszewski, T. Spalvins

NASA Technical Reports Server (NASA) · 1966 · 19 citations · 2 references

Concepts

References

2

Vacuum Deposition of Thin Films

L. Holland, Joseph Greenspan · Journal of The Electrochemical Society · 1957 · 861 citations

, , +11

FILM DEPOSITION USING ACCELERATED IONS

D.M. Mattox · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 1964 · 52 citations

, , +6