Submicron integrated circuits

Abstract

The submicrometer silicon MODFET scaling the silicon bipolar transistor submicron gaas, AlGaAs/GaAs, and AlGaAs/InGaAs transistors ultrahigh-speed HEMT LSI circuits resonant tunneling devices and their applications electrical modeling interconnections impact of VLSI technology scaling on computer architectures lateral surfacr superlattices two-dimensional automata in VLSI VLSI electronic neural networks rapid thermal processing of silicon lithography.