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Investigation of grain boundaries in BaSi2 epitaxial films on Si(1 1 1) substrates using transmission electron microscopy and electron-beam-induced current technique

Electrical EngineeringEpitaxial GrowthGrain BoundariesEngineeringTransmission Electron MicroscopyNanoelectronicsSurface ScienceApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationMolecular Beam EpitaxySilicon On InsulatorMicroelectronicsBasi2 Epitaxial Films