Journal of Materials Science · 1979 · 20 citations · 6 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSurface ScienceHydrogen AtomSemiconductor Device MaterialsSilicon MaterialsSilicon Nitride
6
STRUCTURAL ASPECTS OF SILICON NITRIDE
N.L. Parr, R. L. Sands, P. L. Pratt et al. · Powder Metallurgy · 1961 · 14 citations
Natural Sciences, Materials Engineering, Materials Science +10