Concepedia

Gas-phase synthesis of amorphous silicon nitride — reaction paths and powder characteristics

Gerald Ziegenbalg, Thomas Focke, Horst Holldorf, Reinhold Brink, H. Lange

Journal of Materials Science · 1999 · 12 citations · 4 references

DOI

References

4

Synthesis, Characterization, and Consolidation of Si <sub>3</sub> N <sub>4</sub> Obtained from Ammonolysis of SiCl <sub>4</sub>

K. S. Mazdiyasni, Charles M. Cooke · Journal of the American Ceramic Society · 1973 · 145 citations

THE PARTIAL AMMONOLYSIS OF SILICON TETRACHLORIDE

Walter C. Schumb, Leland H. Towle · Journal of the American Chemical Society · 1953 · 23 citations

, , +17

Hexachlorcyclotrisilazan [1]

H. Bürger, Manfred Schulze, Ulrich Wannagat · Inorganic and Nuclear Chemistry Letters · 1967 · 15 citations

Mass Spectrometric Detection of Intermediates in Chemical Vapor Deposition of Si3 N 4 from SiCl4 and  NH 3

Sin‐Shong Lin · Journal of The Electrochemical Society · 1978 · 12 citations

, , +9