Concepedia

Design and optimization of a high-efficiency MPCVD reactor for 4-inch diamond film deposition based on steady-state Multiphysics modeling

Wencong Zhang, Yong Yang, Huacheng Zhu, Xiaoshan Peng, Hongxing Tian, Dongxue Han, Renyu Peng, Li Wu, Wenyan Tian, Junwu Tao

Diamond and Related Materials · 2025 · 39 citations · 54 references

DOI

Concepts

References

54

Empirical Equations to Calculate 16 of the Transport Collision Integrals Ω(<i>l, s</i>)* for the Lennard-Jones (12–6) Potential

Philip D. Neufeld, A. Janzen, R. A. Aziz · The Journal of Chemical Physics · 1972 · 720 citations

, , +8

Chemical vapour deposition synthetic diamond: materials, technology and applications

Journal of Physics Condensed Matter · 2009 · 368 citations · Full text

, , +14

Cross Sections for Electron Collisions with Hydrogen Molecules

Jung‐Sik Yoon, Mi‐Young Song, Jeong‐Min Han et al. · Journal of Physical and Chemical Reference Data · 2008 · 361 citations

, , +16

Cross‐Sections, Rate Constants and Transport Coefficients in Silane Plasma Chemistry

J. Perrin, O. Leroy, Marie‐Claude Bordage · Contributions to Plasma Physics · 1996 · 350 citations

, , +17

Understanding the chemical vapor deposition of diamond: recent progress

J. E. Butler, Yu. A. Mankelevich, Andrew Cheesman et al. · Journal of Physics Condensed Matter · 2009 · 239 citations

, , +13