High-coherence fluxonium qubits manufactured with a wafer-scale-uniformity process

Abstract

Fluxonium qubits are recognized for their high coherence times and high operation fidelities. These are attributed to their unique design incorporating a superinductor, which is typically implemented using an array of over 100 Josephson junctions; however, this complexity poses significant fabrication challenges, particularly in achieving high yield and junction uniformity with traditional methods. Here, we introduce an overlap process for Josephson-junction fabrication that achieves nearly 100% yield and maintains uniformity across a 2-inch (50.8-mm) wafer with less than 5% variation for the phase-slip junction and less than 2% for the entire junction array. We use a compact junction array design that achieves state-of-the-art dielectric loss tangents and flux noise levels, as confirmed by multiple devices. This enables fluxonium qubits to reach energy relaxation times exceeding 1 ms at the flux-frustration point. This work paves the way for scalable, high-coherence fluxonium processors using processes compatible with complementary metal-oxide semiconductor manufacturing, marking a significant step toward practical quantum computing.