Brittle-ductile transition mechanism during grinding 4H-SiC wafer considering laminated structure

Meina Qu, Chuanzhen Huang, Shuiquan Huang, Xiaobo Peng, Zhen Wang, Longhua Xu, Zhengkai Xu, Dijia Zhang, Baosu Guo

International Journal of Mechanical Sciences · 2024 · 24 citations · 71 references

Concepts

References

71