Atomic level surface on aspheric quartz crucible with large sizes induced by developed green chemical mechanical polishing with composite rare earth oxides

Huiguang Sun, Zhenyu Zhang, Zinuo Zeng, Xiangxiang Cui, Cheng Fan, Yang Gu, Hongxiu Zhou, Chunjing Shi, Hao Xu

Surfaces and Interfaces · 2024 · 16 citations · 37 references

Concepts

References

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