Influence of microstructure on the cutting behaviour of silicon - Concepedia

Concepedia

Publication | Open Access

Influence of microstructure on the cutting behaviour of silicon

DOI Full Paper Access

199

Citations

47

References

2016

Year

Saurav Goel, A. M. Kovalchenko, Alexander Stukowski, Graham L. W. Cross

Acta Materialia

Materials ScienceEngineeringMicrofabricationMaterial MachiningMechanical EngineeringSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsMechanics Of MaterialsMicrostructure

References

	Year	Citations

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