Photocatalytic assisted chemical mechanical polishing for silicon carbide using developed ceria coated diamond core-shell abrasives

Xiaoxiao Zhu, Yuziyu Gui, Hao Fu, Juxuan Ding, Zhangchao Mo, Xuesong Jiang, Jifei Sun, Boyuan Ban, Ling Wang, Jian Chen

Tribology International · 2024 · 31 citations · 64 references

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