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High sensitivity capacitive flexible pressure sensor based on PDMS double wrinkled microstructure

Materials ScienceEngineeringFlexible Pressure SensorFlexible ElectronicsMicrofabricationFlexible SensorsHigh SensitivityMechanical EngineeringNano Electro Mechanical SystemSensor DesignFlexible SensorSensor TechnologyMicro-electromechanical System