Concepedia

Publication | Closed Access

Nanopositioning X–Y stage with an embedded Six-DOF error compensation system based on Abbe and Bryan principles

DOI

20

Citations

23

References

2024

Year

Ya-Xiong He, Rong-Wei Lin, Ruijun Li, Jie Li, Zhenying Cheng, Qiaosheng Pan, Qiangxian Huang, Kuang–Chao Fan
Measurement

References

YearCitations

Page 1