Concepedia

Molecular Dynamics Study of Nano-Grinding Behavior for Silicon Wafer Workpieces with Nanoscale Roughness Under Diamond Abrasive Rotation and Translation

Bing Wu, Yunyun Sun, Shijing Wu

Tribology Letters · 2024 · 10 citations · 47 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceComputational Materials ScienceMechanical Behavior Of MaterialsNanotechnologyMachiningMicrofabrication MaterialsNanomechanical PropertiesNanomechanicsNanoscale MaterialsSurface RoughnessDiamond GrindingGrindingGrinding BehaviorNanoindentationNanotribologyRoughnessSilicon Wafer Processing

References

47

Visualization and analysis of atomistic simulation data with OVITO–the Open Visualization Tool

Alexander Stukowski · Modelling and Simulation in Materials Science and Engineering · 2009 · 16.1K citations

Natural Sciences, Chemistry, Visualization +17

On the nature of surface roughness with application to contact mechanics, sealing, rubber friction and adhesion

Journal of Physics Condensed Matter · 2004 · 848 citations · Full text

Natural Sciences, Materials Science, Physics +15

The breakdown of continuum models for mechanical contacts

Binquan Luan, Mark O. Robbins · Nature · 2005 · 667 citations

Engineering, Mechanical Engineering, Physics +14

Surface energy, surface topography and adhesion

D. E. Packham · International Journal of Adhesion and Adhesives · 2003 · 579 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

Quantitative characterization of surface topography using spectral analysis

Tevis D. B. Jacobs, Till Junge, Lars Pastewka · Surface Topography Metrology and Properties · 2017 · 495 citations · Full text

Natural Sciences, Materials Science, Surface Chemistry +16