Damage evolution and removal behaviors of GaN crystals involved in double-grits grinding

Abstract

Highlights Molecular dynamics simulation of double-grits interacted grinding of GaN crystals is performed. Interacted distance with both radial and transverse directions is better than that with only one direction or single-grit grinding. Girt-interactions decrease force, friction coefficient, stress, damage depth, and abrasive wear. Amorphous, phase transition, dislocation, stacking fault and lattice distortion dominate plastic damage.