Concepedia

The effect of microstructure and film composition on the mechanical properties of linear antenna CVD diamond thin films

Rani Mary Joy, Paulius Pobedinskas, Nina Baule, Shengyuan Bai, Daen Jannis, Nicolas Gauquelin, M.A. Pinault-Thaury, François Jomard, Kamatchi Jothiramalingam Sankaran, Rozita Rouzbahani,

Acta Materialia · 2023 · 14 citations · 48 references

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48

The tension of metallic films deposited by electrolysis

G. Stoney · Proceedings of the Royal Society of London Series A Containing Papers of a Mathematical and Physical Character · 1909 · 4.8K citations · Full text

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What is the Young's Modulus of Silicon?

Matthew A. Hopcroft, William D. Nix, Thomas W. Kenny · Journal of Microelectromechanical Systems · 2010 · 2K citations

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Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers

G. C. A. M. Janssen, Mostafa Abdalla, B. R. Pujada et al. · Thin Solid Films · 2008 · 698 citations

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Elastic, mechanical, and thermal properties of nanocrystalline diamond films

John Philip, Peter Hess, Tatyana I. Feygelson et al. · Journal of Applied Physics · 2003 · 278 citations

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Intrinsic stress in diamond films prepared by microwave plasma CVD

H. Windischmann, Glenn F. Epps, Yue Cong et al. · Journal of Applied Physics · 1991 · 262 citations

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