Publication | Closed Access
A white-light interferometry method for 3D measurement of compactly spaced micro-nano structural units
20
Citations
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References
2023
Year
EngineeringPhysicsMicrofabricationOptical PropertiesMicroscopyOptical TestingApplied PhysicsNanometrologyMicro-optical ComponentMicro-nano Structural UnitsWhite-light Interferometry MethodNanolithography MethodNanophotonics
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