The role of ammonium citrate and dodecyl pyridinium chloride on chemical mechanical polishing relevant to SiO2 dielectric layer

Chemical processes in glass polishing

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Natural Sciences, Chemistry, Materials Science +11

On progress in forces since the DLVO theory

Barry W. Ninham · Advances in Colloid and Interface Science · 1999 · 405 citations

Natural Sciences, Physics, Condensed Matter Physics +7

Handbook of Thin-Film Deposition Processes and Techniques

M. Henini · Microelectronics Journal · 2000 · 295 citations

Natural Sciences, Materials Engineering, Materials Science +12

Comparison between SiOC Thin Film by plasma enhance chemical vapor deposition and SiO2 Thin Film by Fourier Transform Infrared Spectroscopy

Teresa Oh, Chi Kyu Choi · Journal of the Korean Physical Society · 2010 · 230 citations

Natural Sciences, Materials Engineering, Materials Science +13

Chemical mechanical polishing: Theory and experiment

Dewen Zhao, Xinchun Lu · Friction · 2013 · 229 citations · Full text

Engineering, Materials Engineering, Materials Science +13