Publication | Closed Access
The role of ammonium citrate and dodecyl pyridinium chloride on chemical mechanical polishing relevant to SiO2 dielectric layer
18
Citations
34
References
2023
Year
Materials EngineeringMaterials ScienceChemical EngineeringSurface CharacterizationAmmonium CitrateEngineeringMaterial AnalysisSurface ScienceDodecyl Pyridinium ChlorideSurface TreatmentChemistrySurface ProcessingSio2 Dielectric Layer
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