Sensors and Actuators A Physical · 2023 · 19 citations · 41 references
EngineeringMechanical EngineeringMechatronics EngineeringMicroelectromechanical SystemsNanotechnologyVibrationControl SystemsControl TheoryPiezoelectric ActuationPiezoelectric ActuatorsPiezoelectric MaterialsTrajectory DynamicsFractional-order ControlNanoactuatorsNanopositioningNanopositioning SystemsPiezoelectric Actuator ModelingPiezoelectric EffectSliding Mode ControlTrajectory Tracking Control
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