Thin Solid Films · 2023 · 13 citations · 27 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationThin FilmsTribologySilicon MaterialsThin Film Mechanical PropertiesThin-film MaterialsTribological MaterialsAmorphous SiliconSilicon NitrideSilicon PhysicsSilicon Surface ScienceSilicon Thin FilmsTribological Surface Characterization
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Towards the understanding of mechanical properties of super- and ultrahard nanocomposites
S. Vepřek, A. S. Argon · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 260 citations
Natural Sciences, Materials Engineering, Materials Science +17