Surface topography detection based on an optical differential metasurface

Abstract

Surface topography detection can extract critical characteristics from objects, playing an important role in target identification and precision measurement. Here, an optical method with the advantages of low power consumption, high speed, and simple devices is proposed to realize the surface topography detection of low-contrast phase objects. By constructing reflected light paths, a metasurface can perform spatial differential operation via receiving the light directly reflected from a target. Therefore, our scheme is experimentally demonstrated as having remarkable universality, which can be used not only for opaque objects, but also for transparent pure phase objects. It provides a new, to the best of our knowledge, application for optical differential metasurfaces in precise detection of microscale surface topography.