Chemical mechanical polishing for potassium dihydrogen phosphate using four kinds of green developed slurries

Xiangxiang Cui, Zhenyu Zhang, Jianjun Yang, Zheng Ren, Hongxiu Zhou, Chunjing Shi, Fanning Meng, Junyuan Feng, Shuming Zhao

Journal of Manufacturing Processes · 2023 · 11 citations · 35 references

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