Concepedia

Publication | Open Access

Preferential crystal orientation etching of GaN nanopillars in Cl2 plasma

DOIFull Paper Access

13

Citations

35

References

2023

Year

L. Jaloustre, Valentin Ackermann, Saron Sales De Mello, S. Labau, Camille Petit‐Etienne, E. Pargon
Materials Science in Semiconductor Processing

References

YearCitations

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