Monolithic Integration of GaN-Based Green Micro-LED and Quasi-Vertical MOSFET Utilizing a Hybrid Tunnel Junction

Abstract

We demonstrated the monolithic integration of GaN-based driving metal-oxide-semiconductor field effect transistor (MOSFET) on micro-light-emitting diodes ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula> LEDs) by regrowing a hybrid tunnel junction (TJ) on top of a commercial green LED wafer. The hybrid TJ served not only as the current spreading layer for <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula> LEDs, but the n/p/n structure of the LED + TJ stack could also be utilized for fabricating a quasi-vertical driving MOSFET. The <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula> LED was connected to the MOSFET via the conductive n-GaN layer. By modulating the gate supply voltage, the MOSFET effectively controlled the injection current of the <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula> LED, allowing for precise modulation of its output performance. The integrated 60- <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu \text{m}~\mu $ </tex-math></inline-formula> LED exhibited a high output power of 0.12 mW (~4.2 W/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) at a current of 0.3 mA (around 10 A/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) when the MOSFET was modulated with <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\text{V}_{\text {DD}}$ </tex-math></inline-formula> = 5 V and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\text{V}_{\text {G}}$ </tex-math></inline-formula> = 16 V, demonstrating good <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula> LED performance and comparable driving capability to previous GaN-based MOSFETs and oxide-based thin film transistors. This work provides a new method for GaN FET/LED monolithic integration, which paves the way for potential applications in visible light communication and flexible <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula> LED displays.