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Plasma damage-free deposition of transparent Sn-doped In2O3 top cathode using isolated plasma soft deposition for perovskite solar cells

Materials ScienceEngineeringPerovskite Solar CellPlasma ProcessingApplied PhysicsPlasma Damage-free DepositionHalide PerovskitesPerovskite Solar CellsSolar CellsLead-free PerovskitesPerovskite ModulePhotovoltaics