Publication | Closed Access
Fabrication of wafer-scale ordered micro/nanostructures for SERS substrates using rotational symmetry cantilever-based probe lithography
16
Citations
45
References
2023
Year
Materials ScienceWafer Scale ProcessingEngineeringMicrofabricationNanomaterialsNanotechnologyApplied PhysicsNanolithographySers SubstratesNanometrologyMicro-optical ComponentMicroelectronicsWafer-scale Ordered Micro/nanostructuresNanolithography Method
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