Publication | Open Access

High-throughput manufacturing of epitaxial membranes from a single wafer by 2D materials-based layer transfer process

Materials ScienceMaterials EngineeringMembrane StructureEpitaxial MembranesEngineeringWafer Scale ProcessingMicrofabricationSingle WaferSurface ScienceApplied PhysicsPorous MembraneCeramic MembraneSemiconductor Device FabricationElectronic PackagingHigh-throughput Manufacturing