Effect of oxygen flow ratio on the performance of RF magnetron sputtered Sn-doped Ga2O3 films and ultraviolet photodetector - Concepedia

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Effect of oxygen flow ratio on the performance of RF magnetron sputtered Sn-doped Ga2O3 films and ultraviolet photodetector

43

Citations

64

References

2022

Year

Chen Wang, Wei‐Hang Fan, Yuchao Zhang, Pin-Chun Kang, Wan-Yu Wu, Dong‐Sing Wuu, Shui‐Yang Lien, Wen‐Zhang Zhu

Ceramics International

Materials ScienceEngineeringUltraviolet PhotodetectorOxide ElectronicsApplied PhysicsOxygen Flow RatioRf MagnetronGallium OxideThin FilmsOptoelectronics

References

	Year	Citations

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